FIB lift-out STEM failure analysis technique

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn 2002-January, Issue , 2002, Pages 157-158

  Stevie, F A ^a   Vartuli, C B ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b AGERE SYSTEMS   (United States)

Author keywords

Failure analysis; Image analysis; Information analysis; Instruments; Lenses; Probes; Scanning electron microscopy; Spectroscopy; Transmission electron microscopy; Vacuum systems

Indexed keywords

DEFECTS; ELECTRON MICROSCOPY; FOCUSED ION BEAMS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IMAGE ANALYSIS; IMAGE SEGMENTATION; INFORMATION ANALYSIS; INSTRUMENTS; INTEGRATED CIRCUITS; ION BEAMS; LENSES; PROBES; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ANALYSIS TECHNIQUES; DEVICE FABRICATIONS; DEVICE PERFORMANCE; ELEMENTAL IDENTIFICATIONS; MATERIAL REMOVAL; REGION OF INTEREST; SCANNING TRANSMISSION ELECTRON MICROSCOPES; VACUUM SYSTEM;

FAILURE ANALYSIS;

EID: 84948748454     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2002.1025637     Document Type: Conference Paper

References (7)

1. L. A. Giannuzzi, J. L. Drown, S. R. Brown, R. B. Irwin, and F. A. Stevie "Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section TEM Specimen Preparation", Mat. Res. Soc. Symp. Proc., Workshop on Specimen Preparation for TEM of Materials IV, Vol. 480, 19-27 (1997).
2. L. A. Giannuzzi, J. L. Drown, S. R. Brown, R. B. Irwin, and F. A. Stevie, "Applications of the FIB Lift-Out Technique for TEM Specimen Preparation", Microscopy Research and Technique 41, 285-290 (1998).
3. L. A. Giannuzzi and F. A. Stevie "A Review of Focused Ion Beam Milling Techniques for TEM Specimen Preparation", Micron 30, 197-204 (1999).
4. F. A. Stevie, C. B. Vartuli, L. A. Giannuzzi, T. L. Shofner, S. R. Brown, B. Rossie, F. Hillion, R. H. Mills, M. Antonell, R. B. Irwin, and B. M. Purcell, "Application of Focused Ion Beam Lift-Out Specimen Preparation to TEM, SEM, STEM, AES, and SIMS Analysis", Surface and Interface Analysis 31, 345-351 (2001).
5. C. B. Vartuli, F. A. Stevie, D. A. Wollman, M. Antonell, R. B. Irwin, J. M. McKinley, T. L. Shofner, B. M. Purcell, S. A. Anderson, and B. To, "Comparison of Elemental Detection Using Microcalorimetry, SIMS, AES, and EDS (SEM, STEM, and TEM), Microscopy and Microanalysis Proceedings (2000) 128-129.
6. C. B. Vartuli, F. A. Stevie, L. A. Giannuzzi, T. L. Shofner, B. M. Purcell, R. B. Irwin, J. M. McKinley, and R. J. Wesson, "Calibration Method for Elemental Quantification", Microscopy and Microanalysis Proceedings (2000) 536.
7. C. B. Vartuli, F. A. Stevie, B. M. Purcell, A. Schwitter, B. Rossie, S. Brown, T. L. Shofner, S. D. Anderson, J. M. McKinley, and R. B. Irwin, "Energy Dispersive Spectrometry Calibration of Fe and Co" Microscopy and Microanalysis Proceedings (2001) 200.