Thermochemical understanding of dielectric breakdown in HfSiON with current acceleration

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2005, Pages 67-74

  Yamaguchi, T ^a   Hirano, I ^a   Iijima, R ^a   Sekine, K ^b   Takayanagi, M ^b   Eguchi, K ^b   Mitani, Y ^a   Fukushima, N ^a  

^a Advanced LSI Technology Laboratory   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT ACCELERATION; DIELECTRIC BREAKDOWN; HFSION DIELECTRICS;

ACCELERATION; DIELECTRIC MATERIALS; ELECTRIC CURRENTS; HAFNIUM COMPOUNDS; HIGH TEMPERATURE EFFECTS;

ELECTRIC BREAKDOWN;

EID: 28744440727     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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