Nanopatterning of Si(110) surface by ion sputtering: An experimental and simulation study

Physical Review B - Condensed Matter and Materials Physics

Volumn 71, Issue 15, 2005, Pages

  Ling, Li ^a   Li, Wei Qing ^a   Qi, Le Jun ^a   Lu, Ming ^a   Yang, Xinju ^a   Gu, Chang Xin ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 28644450390     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.71.155329     Document Type: Article

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