New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties

Proceedings of the IEEE 2005 International Interconnect Technology Conference, IITC

Volumn , Issue , 2005, Pages 226-228

  Geraud, Dubois ^a   Magbitang, Teddie ^a   Volksen, Willi ^a   Simonyi, Eva E ^b   Miller, Robert D ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ORGANOSILICATE MATERIALS; PRECURSORS; SPIN-ON OXYCARBOSILANE;

ELASTIC MODULI; MONOMERS; POROSITY; SYNTHESIS (CHEMICAL); THIN FILMS; TOUGHENING;

DIELECTRIC MATERIALS;

EID: 28244472758     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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