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Materials Research Society Symposium - Proceedings

Volumn 716, Issue , 2002, Pages 343-348

Strength-porosity relationship of nanoporous MSSQ films characterised by Brillouin light scattering and surface acoustic wave spectroscopy

(5) Flannery, C M a Wittkowski, T b Jung, K b Hillebrands, B b Baklanov, M R c

a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK (Germany)

b Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

c IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SPECTROSCOPY; ACOUSTIC WAVES; BRILLOUIN SCATTERING; DENSITY (SPECIFIC GRAVITY); ELASTIC MODULI; INDENTATION; LIGHT SCATTERING; NANOSTRUCTURED MATERIALS; PERMITTIVITY; POROSITY; STIFFNESS; STRENGTH OF MATERIALS;

BRILLOUIN LIGHT SCATTERING; NANOINDENTATION; NANOPOROUS METHYLSILSESQUIOXANE FILMS;

AEROGELS;

EID: 0036945772 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-716-b7.17 Document Type: Conference Paper

Times cited : (1)

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