Deposition of Bi4-xLaxTi3O12 films by direct liquid injection-metalorganic chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 340-343

  Kang, Sang Woo ^a   Rhee, Shi Woo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTROMAGNETIC WAVE POLARIZATION; FATIGUE OF MATERIALS; FILM GROWTH; FILM PREPARATION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; PHASE COMPOSITION; REMANENCE; SOLUTIONS; TEMPERATURE; X RAY DIFFRACTION ANALYSIS;

BISMUTH LANTHANUM TINATANIUM OXIDES; CRYSTALLINITY; DIRECT LIQUID INJECTION-METALORGANIC CHEMICAL VAPOR DEPOSITION; INDUCTIVELY COUPLED PLASMA ATOMIC EMISSION SPECTROMETRY; PENTAMETHYLDIETHYLENETRIAMINE; REMANENT POLARIZATION;

BISMUTH COMPOUNDS;

EID: 0037273697     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1532739     Document Type: Article

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