Grazing-exit electron probe X-ray microanalysis (GE-EPMA): Fundamental and applications

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 60, Issue 11, 2005, Pages 1381-1391

  Tsuji, Kouichi ^a,b  

^a Osaka Prefecture University   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

EPMA; Grazing exit; Particle analysis; SEM EDS; Surface analysis

Indexed keywords

NANOTECHNOLOGY; RADIATION DETECTORS; SCANNING ELECTRON MICROSCOPY; SPECTROMETRY; THIN FILMS; X RAYS;

EPMA; GRAZING EXIT; PARTICLE ANALYSIS; SEM-EDS;

MICROANALYSIS;

EID: 28044437515     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2005.08.013     Document Type: Review

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