Quantitative analysis of metallic ultra-thin films by grazing-exit electron probe x-ray microanalysis

X-Ray Spectrometry

Volumn 31, Issue 2, 2002, Pages 178-183

  Spolnik, Z ^a   Tsuji, K ^a   Saito, K ^a   Asami, K ^a   Wagatsuma, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON PROBE MICROANALYSIS; PROBES; ULTRATHIN FILMS;

CALIBRATION CURVES; CRITICAL VALUE; DETECTION LIMITS; ELECTRON PROBE X RAY MICROANALYSIS; FILM-THICKNESS; FIRST ORDER; GRAZING EXIT; MATRICES EFFECT; METALLICS; ULTRA-THIN FILM;

THICK FILMS;

EID: 0036109394     PISSN: 00498246     EISSN: None     Source Type: Journal    
DOI: 10.1002/xrs.522     Document Type: Article

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