Localized thin-film analysis by grazing-exit electron probe microanalysis

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 57, Issue 5, 2002, Pages 897-906

  Tsuji, Kouichi ^a   Saito, Kesami ^a   Asami, Katsuhiko ^a   Wagatsuma, Kazuaki ^a   Delalieux, Filip ^a   Spolnik, Zoya ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Electron probe microanalysis; Grazing exit; Scanning electron microscope; Surface analysis; Thin film

Indexed keywords

CALCULATIONS; ELECTRONS; EVAPORATION; MAGNETRON SPUTTERING; MICROANALYSIS; NONDESTRUCTIVE EXAMINATION; PROBES; RADIATION DETECTORS; SCANNING ELECTRON MICROSCOPY; X RAYS;

ELECTRON PROBE MICROANALYSIS; SURFACE ANALYSIS;

THIN FILMS;

EID: 0036016421     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(02)00020-4     Document Type: Article

References (15)

1. Grazing-exit electron probe microanalysis for surface and particle analysis
2. Enhancement of electron-induced X-ray intensity for single particles under grazing-exit conditions
3. Detection limit of grazing-exit electron probe microanalysis (GE-EPMA) for particles analysis
4. Elemental X-ray images obtained by grazing-exit electron probe microanalysis (GE-EPMA)
5. X-ray evanescent-wave absorption and emission
6. Takeoff angle-dependent X-ray fluorescence of layered materials using a glancing incident X-ray beam
7. Depth profiling using the glancing-incidence and -takeoff X-ray fluorescence method
8. Solid surface density determination using the glancing-takeoff X-ray fluorescence method
9. Grazing X-ray reflection analysis of nanometric scale structures
10. Glancing-incidence X-ray fluorescence of layered materials
11. New experimental equipment for grazing-exit electron probe microanalysis (GE-EPMA)
12. Grazing-exit X-ray spectrometry for surface and thin-film analyses
13. Take-off angle-dependent X-ray fluorescence of thin films at glancing incidence