A novel microneedle array integrated with a PDMS biochip for microfluid systems

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1446-1449

  Paik, Seung Joon ^a   Lim, Jung Min ^a   Jung, Ilwoo ^a   Park, Yonghwa ^a   Byun, Sangwon ^a   Chung, Seok ^b   Chun, Kukjin ^a   Chang, Junkeun ^a,b   Cho, Dongil Dan ^a  

^a Seoul National University   (South Korea)

^b Digital Bio Technology Co Ltd   (South Korea)

Author keywords

Anisotropic magnetoresistance; Dry etching; In vitro; In vivo; Ink; Mechanical factors; Mice; Microchannel; Shafts; Testing

Indexed keywords

ACTUATORS; ANISOTROPIC ETCHING; ANISOTROPY; BIOCHIPS; ENHANCED MAGNETORESISTANCE; FABRICATION; INK; MAMMALS; MICROCHANNELS; MICROSYSTEMS; NEEDLES; POLYDIMETHYLSILOXANE; SILICON WAFERS; SILICONES; SINGLE CRYSTALS; SOLID-STATE SENSORS; TESTING; TRANSDUCERS;

IN-VITRO; IN-VIVO; MECHANICAL FACTORS; MICE; SHAFTS;

DRY ETCHING;

EID: 84899837398     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1217048     Document Type: Conference Paper

References (10)

1. I. Papautsky, A. B. Frazier, and H. Swerdlow, "Micromachined Pipette Arrays (MPA)," International Conference on Microelectromechanical Systems (MEMS '97), pp. 317-322, 1997.
2. D. V. McAllister, F. Cros, S. P. Davis, L. M. Matta, M. R. Prausnitz, and A. G. Allen, "Three-dimensional Hollow Microneedle and Microtube Arrays," International Conference on Solid State Sensors and Actuators (Transducers '99), pp. 1098-1101, 1999.
3. L. Lin and A. P. Pisano, "Silicon-processed Microneedles," Journal of Microelectromechanical Systems, 8, pp.78-84, 1999.
4. P. A. Stupar, and A. P. Pisano, "Silicon, Parylene, and Silicon/Parylene Micro-needles for Strength and Toughness," International Conference on Solid State Sensors and Actuators (Transducers '01), pp. 1386-1389, 2001.
5. J. D. Zahn, A. A. Deshmukh, A. P. Pisano, and D. Liepmann, "Continuous On-chip Micropumping through a Microneedle," International Conference on Microelectromechanical Systems (MEMS '01), pp. 503-506, 2001.
6. P. Griss and G. Stemme, "Novel, Side Opened Out-of-plane Microneedles for Microfluidic Transdermal Interfacing," International Conference on Microelectromechanical Systems (MEMS '02), pp. 467-470, 2002.
7. J. G. E. Gardeniers, J. W. Berenschot, M. J. de Boer, Y. Yeshurun, M. Hefetz, R. van't Oever, and A. van den Berg, "Silicon Micromachined Hollow Microneedles for Transdermal Liquid Transfer," International Conference on Microelectromechanical Systems (MEMS '02), pp. 141-144, 2002.
8. S. Paik, J. Kim, S. Park, S. Kim, K. Chun, J. Chang, and D. Cho, "Silicon-micromachined Microneedle for the Blood Test System," International Sensor Conference, pp. 97-98, 2001.
9. S. Paik, J. Kim, S. Park, S. Kim, K. Chun, J. Chang, and D. Cho, Proc. "Integrated Silicon Microneedles for Biofluid Diagnosis System," Pac. Rim Workshop on Transducers and Micro/Nano Technologies, pp. 725-728, 2002.
10. C. J. Wilson and P. A. Beck, "Fracture Testing of Bulk Silicon Microcantilever Beams Subjected to a Side Load," Journal of Microelectromechanical Systems, 5, pp. 142-150, 1996.