Comparison study of (001)-/(100)-oriented epitaxial and fiber-textured Pb(Zr,Ti)O3 thick films prepared by MOCVD

Integrated Ferroelectrics

Volumn 64, Issue , 2004, Pages 217-225

  Yokoyama, Shintaro ^a   Honda, Yoshihisa ^a   Morioka, Hitoshi ^a   Okamoto, Shoji ^a   Iijima, Takashi ^b   Matsuda, Hirofumi ^b   Saito, Keisuke ^c   Funakubo, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c BRUKER AXS INC   (United States)

Author keywords

Composition; Epitaxial; Fiber texture; MOCVD; PZT

Indexed keywords

COMPOSITION; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; IRON COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMITTIVITY;

FIBER TEXTURES; MORPHOTROPIC PHASE BOUNDARY (MPB); PZT;

THICK FILMS;

EID: 27744593017     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490894366     Document Type: Article

References (19)

1. O. Auciello, J. F. Scott, and R. Ramesh. Phys. Today 51, 22 (1998).
2. P. Muralt, J. Micromech, Microeng, 10, 136 (2000).
3. N. Floquet, J. Hector, and P. Gaucher, J. Appl. Phys. 84, 3815 (1998).
4. S. B. Krupanidhi, H. Hu, and V. Kumar, J. Appl. Phys. 71, 376 (1992).
5. R. Ramesh, T. Sands, and V. G. Karamidas, J. Electron. Mater. 23, 19 (1994).
6. T. Li, P. Zawadzki, and R. Stall, Integr, Ferroelectr. 18, 155 (1997).
7. C. M. Foster, G. R. Bai, R. Csencsits, J. Vetrone, R. Jammy, L. A., Wills, E. Carr, and J. Ama J. Appl. Phys. 81, 2349 (1997).
8. H. Funakubo, M. Aratani, T. Oikawa, K. Tokita, and K. Saito, J. Appl. Phys. 92, 6768 (2002).
9. S. Yokoyama, T. Ozeki, T. Oikawa, and H. Funakubo, Integ, Ferro, 59, 1429 (2003).
10. K. Nagashima and H. Funakubo, Jpn. J. Appl. Phys. 39 Part 1, 212 (2000).
11. K. Saito, K. Ishikawa, A. Saiki, I. Yamaji, T. Akai, and H. Funakubo, Integ, Ferro. 33, 59 (2001).
12. K. Saito, T. Oikawa, T. Kurosawa, T. Akai, and H. Funakubo, Jpn. J. Appl. Phys. 41 (Part 1), 6735 (2002).
13. M. Lawrence Arokia Dass (not published).
14. K. Saito, T. Kurosawa, T. Akai, S. Yokoyama, H. Morioka, T. Oikawa, and H. Funakubo, Mater. Res. Soc. Symp. Proc. 748, U13.4 (2003).
15. T. Oikawa, M. Aratani, K. Saito, and H. Funakubo, J. Cryst. Growth 237-239, 455 (2002).
16. B. Jaffe, R. S. Roth, and S. Marzullo, J. Res. Nat. Bur. Stand. 55, 239 (1955).
17. T. Yamamoto, Jpn. J. Appl. Phys. 35, 5104 (1996).
18. T. Iijima, G. He, and H. Funakubo, Integr, Ferroelectr. 36, 255 (2000).
19. S. Hiboux, P. Muralt, and T. Maeder, J. Mater. Res. 14, 4307 (1999).