Electron beam and mechanical lithographies as enabling factors for organic-based device fabrication

Materials Science and Engineering C

Volumn 25, Issue 5-8, 2005, Pages 848-852

  Visconti, P ^a   Pisignano, D ^a   Della Torre, A ^a   Persano, L ^a   Maruccio, G ^a   Biasco, A ^a   Cingolani, R ^a   Rinaldi, R ^a  

^a INFM   (Italy)

Author keywords

Electron beam lithography; Mechanical lithography; Nanoelectronics; Organic devices

Indexed keywords

ELECTRODES; MOLECULAR STRUCTURE; NANOSTRUCTURED MATERIALS; OPTICAL RESOLVING POWER; OPTOELECTRONIC DEVICES;

MECHANICAL LITHOGRAPHY; NANOELECTRONICS; ORGANIC DEVICES; ORGANIC FUNCTIONAL MATERIALS;

ELECTRON BEAM LITHOGRAPHY;

EID: 27744561883     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.07.005     Document Type: Article

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