Benzocyclobutene wafer bonding for III-V nanophotonic guiding structures

Electronics Letters

Volumn 41, Issue 21, 2005, Pages 1170-1172

  Lauvernier, D ^a   Vilcot, J P ^a   Garidel, S ^a   McMurtry, S ^a   Decoster, D ^a  

^a UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; POLYMERS; SEMICONDUCTOR MATERIALS;

ADHESIVE WAFER BONDING; NANOSTRUCTURES; PHOTONIC CIRCUITS; POLYMER MATRIX;

NANOSTRUCTURED MATERIALS;

EID: 27644518126     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20052704     Document Type: Article

References (9)

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