Suppression of oxidation in nickel germanosilicides by Pt incorporation

Applied Physics Letters

Volumn 87, Issue 18, 2005, Pages 1-3

  Rahman, Md Anisur ^a   Osipowicz, Thomas ^a   Pey, K L ^b,c   Jin, L J ^b   Choi, W K ^b,d   Chi, D Z ^e   Antoniadis, D A ^b,f   Fitzgerald, E A ^b,f   Isaacson, D M ^b,f  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b SINGAPORE MIT ALLIANCE   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d Microelectronics Laboratory   (Singapore)

^e INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^f MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOND ENERGY; GERMANOSILICIDE; RESISTANCE MEASUREMENTS;

APPROXIMATION THEORY; ENERGY DISPERSIVE SPECTROSCOPY; OXIDATION; PLATINUM; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

NICKEL COMPOUNDS;

EID: 27344455314     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2120902     Document Type: Article

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