Optical measurement of mechanical stresses in diamond-like carbon films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5776, Issue , 2005, Pages 717-728

  Ohlídal, Ivan ^a   Ohlídal, Miloslav ^b   Franta, Daniel ^a   Čudek, Vladimír ^b   Buršíková, Vilma ^a   Klapetek, Petr ^c   Jákl, Miloš ^b  

^a MASARYK UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^c CZECH METROLOGY INSTITUTE   (Czech Republic)

Author keywords

Chromatic aberration method; DLC films; Mechanical stress; Two beam interferometry

Indexed keywords

ABERRATIONS; DIAMOND LIKE CARBON FILMS; ELLIPSOMETRY; INTERFEROMETRY; OPTICAL ENGINEERING; OPTICAL VARIABLES MEASUREMENT; SILICON; SINGLE CRYSTALS; SPECTROSCOPIC ANALYSIS; STRESSES; SUBSTRATES;

CHROMATIC ABERRATION METHOD; MECHANICAL STRESSES; STONEY'S FORMULA; TWO-BEAM INTERFEROMETRY;

STRESS ANALYSIS;

EID: 26444561397     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.611744     Document Type: Conference Paper

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