Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5527, Issue , 2004, Pages 139-147

  Ohlídal, Ivan ^a   Ohlídal, Miloslav ^b   Franta, Daniel ^a   Čudek, Vladimír ^b   Buršíková, Vilma ^a   Šiler, Martin ^a  

^a MASARYK UNIVERSITY   (Czech Republic)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

DLC films; Mechanical stress; Two beam interferometry

Indexed keywords

ELLIPSOMETRY; FRICTION; HARDNESS; INTERFEROMETRY; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPY; STRESSES;

CORROSIVE GASES; FLOW RATE; THIN SOLID FILMS; TWO-BEAM INTERFEROMETRY;

DIAMOND LIKE CARBON FILMS;

EID: 13444309470     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.562136     Document Type: Conference Paper

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