Electrochemical dissolution of Ta and TaN diffusion barrier materials

Electrochemical and Solid-State Letters

Volumn 8, Issue 10, 2005, Pages

  Du, Bing ^a   Suni, Ian Ivar ^b  

^a CLARKSON UNIVERSITY   (United States)

^b Clarkson University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYCLIC VOLTAMMETRY; DIFFUSION; ELECTRODES; PASSIVATION; TANTALUM COMPOUNDS;

BARRIER MATERIALS; ELECTROCHEMICAL DISSOLUTION; PASSIVE FILMS; SATURATED CALOMEL ELECTRODE (SCE);

ELECTROCHEMISTRY;

EID: 25644460085     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2030527     Document Type: Article

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