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Journal of Applied Physics

Volumn 77, Issue 12, 1995, Pages 6630-6635

Low-temperature formation of metastable cubic tantalum nitride by metal condensation under ion irradiation

(3) Ensinger, W a Kiuchi, M b Satou, M b

a UNIVERSITY OF AUGSBURG (Germany)

b OSAKA NATIONAL RESEARCH INSTITUTE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 6744259762 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.359073 Document Type: Article

Times cited : (52)

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