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Volumn 29, Issue 1-2, 2005, Pages 87-99
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Intrinsically biased, resonant NEMS-MEMS oscillator and the second law of thermodynamics
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Author keywords
Cantilever; MEMS; NEMS; Oscillator; Second law of thermodynamics
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Indexed keywords
CANTILEVER BEAMS;
CAPACITORS;
MICROELECTROMECHANICAL DEVICES;
SEMICONDUCTOR MATERIALS;
THERMODYNAMICS;
CANTILEVERS;
NEMS;
PARALLEL-PLATE CAPACITORS;
SECOND LAW OF THERMODYNAMICS;
OSCILLATORS (ELECTRONIC);
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EID: 25644451865
PISSN: 13869477
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physe.2005.05.005 Document Type: Conference Paper |
Times cited : (20)
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References (58)
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