The autonomous impact resonator: A new operating principle for a silicon resonant strain gauge

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 40-49

  Bienstman, Jan ^a   Vandewalle, Joos ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Autonomous; Chaos; Electrostatic; Non linear; Periodic oscillation; Silicon resonators; Strain gauges

Indexed keywords

CHAOS THEORY; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OSCILLATORS (MECHANICAL); SILICON SENSORS; STRAIN GAGES; VIBRATIONS (MECHANICAL);

AUTONOMOUS IMPACT RESONATORS; SILICON RESONATORS;

RESONATORS;

EID: 0032050515     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01714-7     Document Type: Article

References (14)

1. J.J. Yao, N.C. MacDonald, A micromachined, single-crystal silicon, tunable resonator, J. Micromech. Microeng. 6 (1996) 257-264.
2. H.A.C. Tilmans, R. Legtenberg, Electrostatically driven vacuum-encapsulated polysilicon resonators. Part II: theory and performance, Sensors and Actuators A 45 (1994) 67-84.
3. K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida, K. Harada, Study of nonlinear vibration of silicon resonant beam strain gauge, Proc. 8th Sensor Symp., Tokyo, Japan, 1989, pp. 21-24.
4. H.A.C. Tilmans, M. Elwenspoek, J.H.J. Fluitman, Micro resonant force gauges, Sensors and Actuators A 30 (1992) 35-53.
5. C. Gui, R. Legtenberg, H.A.C. Tilmans, J.H.J. Fluitman, M. Elwenspoek, Nonlinearity and hysteresis of resonant strain gauges, Proc. MEMS 95 Conf., Amsterdam, The Netherlands, Jan. 1995, pp. 157-162.
6. T.E. Shirley, S.D. Senturia, Frequency-pulling effects in amplitude-stiffened resonant sensors, Proc. 7th. Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, 2-5 June, 1993, pp. 458-461.
7. J. Bienstman, H.A.C. Tilmans, E.J.E.A. Peeters, M. Steyaert, R.Puers, An oscillator circuit for electrostatically driven silicon-based one-port resonators, Sensors and Actuators A 52 (1996) 179-186.
8. S.W. Shaw, P.J. Holmes, A periodically forced piecewise linear oscillator, J. Sound Vibration 90 (1983) 129-155.
9. J.M.T. Thompson, R. Ghaffari, Chaos after period-doubling bifurcations in the resonance of an impact oscillator, Phys. Lett. A91 (1982) 5-8.
10. J.M.T. Thompson, Complex dynamics of compliant off-shore structures, Proc. R. Soc. London A387 (1983) 407-427.
11. H.M. Isomäki, J. von Boehm, J. Räty, Devil's attractors and chaos of a driven impact oscillator, Phys. Lett. A107 (1985) 343-346.
12. T.S. Parker, L.O. Chua, Practical Numerical Algorithms for Chaotic Systems, Springer, New York, 1989, pp. 31-82.
13. L. Duchesne, Using characteristic multiplier loci to predict bifurcation phenomena and chaos - a tutorial, IEEE Trans. Circuits Syst. 40 (1993) 683-688.
14. B. Puers, M. Albrechts, A SCS resonant strain sensor, Abstracts, Eurosensors VIII, Toulouse, France, 25-28 Sept. 1994, p. 257.