Self-regulating charge control for ultra high resolution scanning electron microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5766, Issue , 2005, Pages 49-59

  Toth, Milos ^a   Thiel, Brad L ^b   Knowles, William R ^a  

^a Thermo Fisher Scientific   (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

Charge control; Charging; Dielectric; ESEM; Imaging; Secondary electron; Self regulation; Total yield; Ultra high resolution

Indexed keywords

CURRENT DENSITY; DIELECTRIC MATERIALS; ELECTRIC CONDUCTORS; ELECTRIC INSULATORS; ELECTRON BEAMS; IMAGING TECHNIQUES; MAGNETIC FIELD EFFECTS;

CHARGE CONTROL; CHARGING; ESEM; SECONDARY ELECTRON; SELF-REGULATION; TOTAL YIELD; ULTRA HIGH RESOLUTION;

SCANNING ELECTRON MICROSCOPY;

EID: 25644444389     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603070     Document Type: Conference Paper

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