Strategies for low- and very-low-energy SEM

Journal of Electron Microscopy

Volumn 48, Issue 3, 1999, Pages 205-219

  Frank, L ^a   Mullerova I ^a  

^a INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

Author keywords

Low energy scanning electron microscopy; Very low energy scanning electron microscopy

Indexed keywords

ELECTRIC FIELDS;

ENERGY SCANNING; IMMERSION LENS; LOW-ENERGY SCANNING ELECTRON MICROSCOPY; LOWER ENERGIES; OPERATION RANGE; PRIMARY BEAM ENERGIES; PRIMARY BEAMS; VERY-LOW-ENERGY SCANNING ELECTRON MICROSCOPY;

SCANNING ELECTRON MICROSCOPY;

EID: 0344348992     PISSN: 00220744     EISSN: None     Source Type: Journal    
DOI: 10.1093/oxfordjournals.jmicro.a023671     Document Type: Article

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