Experimental results using a 'low-voltage booster' in a conventional SEM

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 427, Issue 1-2, 1999, Pages 126-130

  Plies, E ^a   Degel, B ^a   Hayn, A ^a   Knell, G ^a   Neumann, J ^a   Schiebel, B ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRONS; LENSES; MAGNETIC FIELDS;

LOW VOLTAGE BOOSTER; RESOLUTION;

SCANNING ELECTRON MICROSCOPY;

EID: 0345102527     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(98)01560-5     Document Type: Article

References (8)

1. Boersch H. Z. Phys. 139:1954;115.
2. Frosien J., Plies E., Anger K. J. Vac. Sci. Technol. B. 7:1989;1874.
3. E. Weimer, J.-P. Martin, Proceedings of the 13th International Congress on Electron Microscopy, vol. 1, Paris, 1994, p. 67.
4. E. Plies, US Patent 5,146,090, September 8, 1992.
5. Beck S., Plies E., Schiebel B. Nucl. Instr. and Meth. A. 363:1995;31.
6. Gribi M., Thürkauf M., Villinger W., Wegmann L. Optik. 16:1959;65.
7. Shannon J.P., Philp S.F., Trump J.G. J. Vac. Sci. Technol. 2:1965;234.
8. Martin J.-P., Geisler D. Optik. 36:1972;322.