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Volumn 82, Issue 2, 2005, Pages 113-118

Detection of open or closed porosity in low-κ dielectrics by solvent diffusion

(7) Worsley, Marcus A a Roberts, Mark a Bent, Stacey F a Gates, Stephen M b Shaw, Thomas b Volksen, Willi c Miller, Robert c

a Stanford University (United States)

b IBM T J WATSON RESEARCH CENTER (United States)

c IBM ALMADEN RESEARCH CENTER (United States)

Author keywords

Dielectric material; Diffusion; Diffusivity; Interconnectivity; Low ; Porosity; Porous material

Indexed keywords

DIFFUSION; ORGANIC SOLVENTS; ORGANOMETALLICS; POROSITY; POROUS MATERIALS; POROUS SILICON; TOLUENE;

DETECTION; DIFFUSIVITY; INTERCONNECTIVITY; LOW-Κ;

DIELECTRIC MATERIALS;

EID: 25444508288 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2005.06.007 Document Type: Article

Times cited : (22)

References (24)

1
- 4444230968
- Santa Clara
- International Technology Roadmap for Semiconductors, ITRS, Santa Clara, 2001.
- (2001) International Technology Roadmap for Semiconductors, ITRS

2
- 0033677323
- M. Morgen, E.T. Ryan, J.H. Zhao, C. Hu, T.H. Cho, and P.S. Ho Annu. Rev. Mater. Sci. 30 2000 645
- (2000) Annu. Rev. Mater. Sci. , vol.30 , pp. 645
- Morgen, M.¹ Ryan, E.T.² Zhao, J.H.³ Hu, C.⁴ Cho, T.H.⁵ Ho, P.S.⁶

3
- 0037666297
- K. Maex, M.R. Baklanov, D. Shamiryan, F. Iacopi, S.H. Brongersma, and Z.S. Yanovitskaya J. Appl. Phys. 93 2003 8793
- (2003) J. Appl. Phys. , vol.93 , pp. 8793
- Maex, K.¹ Baklanov, M.R.² Shamiryan, D.³ Iacopi, F.⁴ Brongersma, S.H.⁵ Yanovitskaya, Z.S.⁶

4
- 0032166845
- J.L. Hedrick, R.D. Miller, C.J. Hawker, K.R. Carter, W. Volksen, D.Y. Yoon, and M. Trollsas Adv. Mater. 10 1998 1049
- (1998) Adv. Mater. , vol.10 , pp. 1049
- Hedrick, J.L.¹ Miller, R.D.² Hawker, C.J.³ Carter, K.R.⁴ Volksen, W.⁵ Yoon, D.Y.⁶ Trollsas, M.⁷

5
- 0035131233
- D.G. Shamiryan, M.R. Baklanov, S. Vanhaelemeersch, and K. Maex Electrochem. Solid-State Lett. 4 2001 F3
- (2001) Electrochem. Solid-State Lett. , vol.4
- Shamiryan, D.G.¹ Baklanov, M.R.² Vanhaelemeersch, S.³ Maex, K.⁴

6
- 0033076114
- A.T. Kohl, R. Mimna, R. Shick, L. Rhodes, Z.L. Wang, and P.A. Kohl Electrochem. Solid-State Lett. 2 1999 77
- (1999) Electrochem. Solid-State Lett. , vol.2 , pp. 77
- Kohl, A.T.¹ Mimna, R.² Shick, R.³ Rhodes, L.⁴ Wang, Z.L.⁵ Kohl, P.A.⁶

7
- 0036124383
- S. Yang, P.A. Mirau, C.S. Pai, O. Nalamasu, E. Reichmanis, J.C. Pai, Y.S. Obeng, J. Seputro, E.K. Lin, H.J. Lee, J.N. Sun, and D.W. Gidley Chem. Mater. 14 2002 369
- (2002) Chem. Mater. , vol.14 , pp. 369
- Yang, S.¹ Mirau, P.A.² Pai, C.S.³ Nalamasu, O.⁴ Reichmanis, E.⁵ Pai, J.C.⁶ Obeng, Y.S.⁷ Seputro, J.⁸ Lin, E.K.⁹ Lee, H.J.¹⁰ Sun, J.N.¹¹ Gidley, D.W.¹²

8
- 25444491104
- US Patent No. 6312793, November 6
- A. Grill, V. Patel, S. Gates, US Patent No. 6312793, November 6, 2001.
- (2001)
- Grill, A.¹ Patel, V.² Gates, S.³

9
- 0012627928
- Cahners Publishing USA
- M. O'Neill, A. Lukas, R. Vrtis, J. Vincent, B. Peterson, M. Bitner, and E. Karwacki Semiconductor International vol. 25 2002 Cahners Publishing USA 93
- (2002) Semiconductor International , vol.25 , pp. 93
- O'Neill, M.¹ Lukas, A.² Vrtis, R.³ Vincent, J.⁴ Peterson, B.⁵ Bitner, M.⁶ Karwacki, E.⁷

10
- 0037175794
- J. Liu, D. Gan, C. Hu, M. Kiene, P.S. Ho, W. Volksen, and R.D. Miller Appl. Phys. Lett. 81 2002 4180
- (2002) Appl. Phys. Lett. , vol.81 , pp. 4180
- Liu, J.¹ Gan, D.² Hu, C.³ Kiene, M.⁴ Ho, P.S.⁵ Volksen, W.⁶ Miller, R.D.⁷

11
- 0035525631
- A.M. Padovani, L. Rhodes, L. Riester, G. Lohman, B. Tsuie, J. Conner, S.A.B. Allen, and P.A. Kohl Electrochem. Solid-State Lett. 4 2001 F25
- (2001) Electrochem. Solid-State Lett. , vol.4
- Padovani, A.M.¹ Rhodes, L.² Riester, L.³ Lohman, G.⁴ Tsuie, B.⁵ Conner, J.⁶ Allen, S.A.B.⁷ Kohl, P.A.⁸

12
- 0036734631
- Q.R. Huang, W. Volksen, E. Huang, M. Toney, C.W. Frank, and R.D. Miller Chem. Mater. 14 2002 3676
- (2002) Chem. Mater. , vol.14 , pp. 3676
- Huang, Q.R.¹ Volksen, W.² Huang, E.³ Toney, M.⁴ Frank, C.W.⁵ Miller, R.D.⁶

13
- 25444468734
- 21-23 October 2003 and 29 September - 1 October 2003, Montreal, Que., Canada and Tokyo, Japan
- T. Abell, D. Shamiryan, M. Patz, K. Maex, in: Presented at the Advanced Metallization Conference 2003 (AMC 2003), 21-23 October 2003 and 29 September - 1 October 2003, Montreal, Que., Canada and Tokyo, Japan, 2004.
- (2004) Advanced Metallization Conference 2003 (AMC 2003)
- Abell, T.¹ Shamiryan, D.² Patz, M.³ Maex, K.⁴

14
- 1542285098
- J.A. Hedstrom, M.F. Toney, E. Huang, H.C. Kim, W. Volksen, T. Magbitang, and R.D. Miller Langmuir 20 2004 1535
- (2004) Langmuir , vol.20 , pp. 1535
- Hedstrom, J.A.¹ Toney, M.F.² Huang, E.³ Kim, H.C.⁴ Volksen, W.⁵ Magbitang, T.⁶ Miller, R.D.⁷

15
- 0036853765
- H.C. Kim, J.B. Wilds, W.D. Hinsberg, L.R. Johnson, W. Volksen, T. Magbitang, V.Y. Lee, J.L. Hedrick, C.J. Hawker, R.D. Miller, and E. Huang Chem. Mater. 14 2002 4628
- (2002) Chem. Mater. , vol.14 , pp. 4628
- Kim, H.C.¹ Wilds, J.B.² Hinsberg, W.D.³ Johnson, L.R.⁴ Volksen, W.⁵ Magbitang, T.⁶ Lee, V.Y.⁷ Hedrick, J.L.⁸ Hawker, C.J.⁹ Miller, R.D.¹⁰ Huang, E.¹¹

16
- 25444453618
- 5-8 April 1999, San Francisco, CA, USA
- R.D. Miller, R. Beyers, K.R. Carter, R.F. Cook, M. Harbison, C.J. Hawker, J.L. Hedrick, V. Lee, E. Liniger, C. Nguyen, J. Remenar, M. Sherwood, M. Trollsas, W. Volksen, D.Y. Yoon, in: Presented at the Low-Dielectric Constant Materials V Symposium, 5-8 April 1999, San Francisco, CA, USA, 1999.
- (1999) Low-dielectric Constant Materials V Symposium
- Miller, R.D.¹ Beyers, R.² Carter, K.R.³ Cook, R.F.⁴ Harbison, M.⁵ Hawker, C.J.⁶ Hedrick, J.L.⁷ Lee, V.⁸ Liniger, E.⁹ Nguyen, C.¹⁰ Remenar, J.¹¹ Sherwood, M.¹² Trollsas, M.¹³ Volksen, W.¹⁴ Yoon, D.Y.¹⁵

17
- 0042865950
- E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, and R.D. Miller Angew. Chem. Int. Ed. 42 2003 3785
- (2003) Angew. Chem. Int. Ed. , vol.42 , pp. 3785
- Connor, E.F.¹ Sundberg, L.K.² Kim, H.C.³ Cornelissen, J.J.⁴ Magbitang, T.⁵ Rice, P.M.⁶ Lee, V.Y.⁷ Hawker, C.J.⁸ Volksen, W.⁹ Hedrick, J.L.¹⁰ Miller, R.D.¹¹

18
- 0037008575
- J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, and R.D. Miller Chem. Eur. J. 8 2002 3308
- (2002) Chem. Eur. J. , vol.8 , pp. 3308
- Hedrick, J.L.¹ Magbitang, T.² Connor, E.F.³ Glauser, T.⁴ Volksen, W.⁵ Hawker, C.J.⁶ Lee, V.Y.⁷ Miller, R.D.⁸

19
- 79956042449
- E. Huang, M.F. Toney, W. Volksen, D. Mecerreyes, P. Brock, H.C. Kim, C.J. Hawker, J.L. Hedrick, V.Y. Lee, T. Magbitang, R.D. Miller, and L.B. Lurio Appl. Phys. Lett. 81 2002 2232
- (2002) Appl. Phys. Lett. , vol.81 , pp. 2232
- Huang, E.¹ Toney, M.F.² Volksen, W.³ Mecerreyes, D.⁴ Brock, P.⁵ Kim, H.C.⁶ Hawker, C.J.⁷ Hedrick, J.L.⁸ Lee, V.Y.⁹ Magbitang, T.¹⁰ Miller, R.D.¹¹ Lurio, L.B.¹²

20
- 0004217602
- McGraw-Hill New York
- R. Perry, and D. Green Perry's Chemical Engineer's Handbook 1997 McGraw-Hill New York
- (1997) Perry's Chemical Engineer's Handbook
- Perry, R.¹ Green, D.²

21
- 0003514681
- MIT Press Cambridge
- C. Satterfield Mass Transfer in Heterogeneous Catalysis 1970 MIT Press Cambridge
- (1970) Mass Transfer in Heterogeneous Catalysis
- Satterfield, C.¹

22
- 3042671843
- J.M. Zalc, S.C. Reyes, and E. Iglesia Chem. Eng. Sci. 59 2004 2947
- (2004) Chem. Eng. Sci. , vol.59 , pp. 2947
- Zalc, J.M.¹ Reyes, S.C.² Iglesia, E.³

23
- 0003610874
- Taylor & Francis London
- D. Stauffer, and A. Aharony Introduction to Percolation Theory 1994 Taylor & Francis London
- (1994) Introduction to Percolation Theory
- Stauffer, D.¹ Aharony, A.²

24
- 0003944113
- Wiley New York
- R. Bird, W. Stewart, and E. Lightfoot Transport Phenomena 1960 Wiley New York
- (1960) Transport Phenomena
- Bird, R.¹ Stewart, W.² Lightfoot, E.³

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