Nanostructural properties of amorphous silicon carbide by GISAXS and optical spectroscopy

Thin Solid Films

Volumn 433, Issue 1-2 SPEC., 2003, Pages 88-91

  Gracin, D ^a   Dubcek, P ^a   Jaksic, M ^a   Bernstorff, S ^b  

^a RUDER BO KOVI INSTITUTE   (Croatia)

^b SINCROTRONE TRIESTE   (Italy)

Author keywords

Amorphous silicon carbide; ERDA; FTIR; GISAXS; Nano structure; Raman; RBS

Indexed keywords

AMORPHOUS SILICON; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; SILICON CARBIDE;

AMORPHOUS SILICON CARBIDE;

THIN FILMS;

EID: 0037601970     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00286-4     Document Type: Conference Paper

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