RASTA - Real-acceleration-for-self-test accelerometer: A new concept for self-testing accelerometers

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 359-368

  Puers, R ^a   Reyntjens, S ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Electromagnetic actuation; Focused ion beam processing; Self testing accelerometer

Indexed keywords

ACCELERATION MEASUREMENT; BUILT-IN SELF TEST; ELECTROMAGNETIC FIELD EFFECTS; MICROMACHINING;

ELECTROMAGNETIC ACTUATION; FOCUSED ION BEAM PROCESSING; SELF TESTING ACCELEROMETER; SILICON BULK MICROMACHINING;

ACCELEROMETERS;

EID: 0036544392     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00023-7     Document Type: Conference Paper

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