Burst technology with feedback-loop control for capacitive detection and electrostatic excitation of resonant silicon sensors

IEEE Transactions on Electron Devices

Volumn 47, Issue 11, 2000, Pages 2228-2235

  Corman, Thierry ^a   Norén, Kjell ^a   Enoksson, Peter ^a   Melin, Jessica ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

"Burst" electronics; Capacitive detection; Discontinuous excitation; Electrostatic excitation; Feedback control; Switching

Indexed keywords

CAPACITANCE MEASUREMENT; DIELECTRIC DEVICES; ELECTRIC EXCITATION; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON DEVICE MANUFACTURE; ELECTRON DEVICE TESTING; ELECTROSTATICS; FEEDBACK CONTROL; NATURAL FREQUENCIES; RESONATORS; SIGNAL TO NOISE RATIO;

BURST TECHNOLOGY; CAPACITIVE DETECTION; DENSITY SENSOR; ELECTROSTATIC EXCITATION; PRESSURE SENSOR; RESONANT SILICON SENSORS;

SILICON SENSORS;

EID: 0034318389     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.877188     Document Type: Article

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