Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 646-650

  Mizuno, Jun ^a   Nottmeyer, Kay ^b   Cabuz, Cleopatra ^a   Minami, Kazuyuki ^a   Kobayashi, Takashi ^b   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b ZEXEL Corporation   (Japan)

Author keywords

Accelerometers; Angular rate sensors; Bulk micromachining; Silicon

Indexed keywords

EID: 24944461460     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80031-3     Document Type: Article

References (6)

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3. F. Rudolf, A. Jornod, J. Bergquist and H. Leuthold, Precision accelerometer with μg resolution, Sensors and Actuators, A21-A23 (1990) 297-302.
4. K. Maenaka, Y. Konishi, T. Shiozawa and M. Maeda, Study of acceleration sensitivities in silicon rate sensors, Tech. Digest 12th Sensor Symp., Osaka, Japan, 2-3 June, 1994, pp. 159-162.
5. P. Grief, B. Boxenhom, T. King and L. Niles, Silicon monolithic micromechanical gyroscope, Tech. Digest, Proc 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, 24-28 June, 1991, pp. 966-968.
6. J. Bernstein, S, Cho, A.T. King, A. Kourepenis, P. Maciel and M. Weinberg, A micromachined comb-drive tuning fork rate gyroscope, Proc. MEMS '93, Fort Lauderdale, FL, USA, 7-10 Feb., 1993, pp. 143-148.