Effects of mean free path on the preferentially orientated growth of AlN thin films

Journal of Crystal Growth

Volumn 283, Issue 3-4, 2005, Pages 315-319

  Chen, Yiping ^a   Wang, Ruzhi ^a   Wang, Bo ^a   Xing, Tao ^a   Song, Xuemei ^a   Zhu, Mankang ^a   Yan, Hui ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

A1. Orientation; A1. X ray diffraction; A3. Sputtering; B1. Aluminum nitride film

Indexed keywords

CRYSTAL GROWTH; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE FILMS; MAGNETIC SPUTTERING METHODS; ORIENTATION; RADIO FREQUENCY (RF);

ALUMINUM NITRIDE;

EID: 24644511151     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.06.007     Document Type: Article

References (13)

1. T. Shiosaki, T. Yamamoto, T. Oda, and A. Kawabata Appl. Phys. Lett. 36 1980 643
2. M.A. Dubois, and P. Muralt Appl. Phys. Lett. 74 1999 3023
3. S. Wu, L. Wu, J.H. Chang, and F.C. Chang Mater. Lett. 51 2001 331
4. V. Lebedev, J. Jinschek, U. Kaiser, B. Schroter, and W. Richter Appl. Phys. Lett. 76 2000 2029
5. A.P. Huang, G.J. Wang, S.L. Xu, M.K. Zhu, G.H. Li, B. Wang, and H. Yan Mater. Sci. Eng. B 107 2004 161
6. A.J. Shuskus, T.M. Reeder, and E.L. Paradis Appl. Phys. Lett. 24 1974 155
7. A.K. Chu, C.H. Chao, F.Z. Lee, and H.L. Huang Thin Solid Films 429 2003 1
8. M. Ishihara, S.J. Li, H. Yumoto, K. Akashi, and Y. Ide Thin Solid Films 316 1998 152
9. Wang Bo, Wang Mei, Wang Ruzhi, Huang Anping, Zhou Hua, Zou Yunjuan, Yan Hui, and Wong Seiping Mater. Lett. 53 2002 367
10. Daoan Da Vacuum Design Handbook 1996 National Defense Industry Press Beijing p. 36 in Chinese
11. Xiao-Hong Xu, Hai-Shun Wu, Cong-Jie Zhang, and Zhi-Hao Jin Thin Solid Films 388 2001 62
12. Hsyi-En Cheng, Tien-Chai Lin, and Wen-Chien Chen Thin Solid Films 425 2003 85
13. B. Wang, Y.N. Zhao, and Z. He Vacuum 48 1997 427