Molecular dynamics simulation of the impact behaviour of various hydrocarbon species on DLC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 315-318

  Neyts, E ^a   Bogaerts, A ^a   Gijbels, R ^a   Benedikta, J ^b   Van De Sanden, M C M ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EXPANDING THERMAL PLASMA (ETP); HYDROCARBON SPECIES; IMPACT BEHAVIOR; STICKING EFFICIENCIES;

COMPUTER SIMULATION; ELECTRONS; HYDROCARBONS; KINETIC ENERGY; PLASMA SOURCES; PROTECTIVE COATINGS; SUBSTRATES; THERMAL EFFECTS;

MOLECULAR DYNAMICS;

EID: 11344295838     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.10.063     Document Type: Conference Paper

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