Fabrication and performance of a flextensional microactuator

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1947-1955

  Cheong, Jongpil ^a   Goyal, Abhijat ^a   Tadigadapa, Srinivas A ^a   Rahn, Christopher D ^a  

^a The Center for Nanotechnology Education and Utilization   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; HYSTERESIS; MICROMACHINING; PIEZOELECTRIC MATERIALS; SILICON; THERMAL EFFECTS;

FLEXTENSIONAL MICROACTUATOR; HETEROGENEOUS MATERIALS; SOLDER BONDING PROCESS; STATIC DEFLECTION CHARACTERISTICS;

MICROACTUATORS;

EID: 24644455978     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/022     Document Type: Review

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