Piezoelectric micro-flextensional actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 106-114

  Cheong, Jongpil ^a   Tadigadapa, Srinivas ^a   Rahn, Chris ^a  

^a The Center for Nanotechnology Education and Utilization   (United States)

Author keywords

Beam; Buckling; Imperfection; PZT

Indexed keywords

PIEZOELECTRIC DISPLACEMENT; PIEZOELECTRIC MICROFLEXTENSIONAL ACTUATORS; PZT; SILICON BEAMS;

BEAMS AND GIRDERS; BORON; BUCKLING; COMPRESSIVE STRESS; DOPING (ADDITIVES); ETCHING; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; SILICON; THERMAL STRESS;

ACTUATORS;

EID: 2142656055     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524817     Document Type: Conference Paper

References (7)

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