Piezoelectric films for MEMS applications

Proceedings - International Symposium on Electrets

Volumn , Issue , 2002, Pages 386-396

  Xu, F ^a   Wolf, R A ^a   Yoshimura, T ^a   Trolier McKinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CRYSTAL ORIENTATION; FERROELECTRIC THIN FILMS; GRAIN SIZE AND SHAPE; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; THERMAL EFFECTS;

ENERGY DENSITY; LEAD ZIRCONATE TITANATE FILM; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM;

DIELECTRIC FILMS;

EID: 0036957972     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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