Structural and electrical analysis of silicon thin films deposited by transformer-coupled-plasma chemical-vapor deposition

Journal of the Korean Physical Society

Volumn 47, Issue 2, 2005, Pages 277-282

  Lee, Hyoung Cheol ^a   Yeom, Geun Young ^a   Lee, Yoo Jin ^b   Shin, Jin Koog ^b   Baik, Sung Il ^c   Kim, Young Woon ^c  

^a Sungkyunkwan University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Grain size; Macrocrystalline; Rf power; Solar cell; Tansformer coupled plasma chemical vapor deposition

Indexed keywords

EID: 24644445269     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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