Current-pressure-voltage characteristics in a planar magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 2, 2003, Pages 375-380

  Escrivao M L ^a   Pereira, P J S ^a,b   Cabral, M H ^a   Teixeira, M R ^a   Maneira, M J P ^a  

^a UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^b INSTITUTO SUPERIOR DE ENGENHARIA DE LISBOA   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC POTENTIAL; ELECTRON SCATTERING; IONIZATION;

MAGNETRON DISCHARGES;

MAGNETRONS;

EID: 0037351386     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1539083     Document Type: Article

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