Electrochemical lithography: fabrication of nanoscale Si tips by porous anodization of Al/Si wafer

Chemical Communications

Volumn 4, Issue 8, 2004, Pages 942-943

  Pu, L ^a   Shi, Y ^a   Zhu, J M ^a   Bao, X M ^a   Zhang, R ^a   Zheng, Y D ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; NANOPARTICLE; SILICON; SULFURIC ACID;

ARTICLE; DENSITY; ELECTROCHEMISTRY;

EID: 2442503291     PISSN: 13597345     EISSN: 1364548X     Source Type: Journal    
DOI: 10.1039/b315810a     Document Type: Article

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