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Volumn 65, Issue 11, 2002, Pages 1153061-1153064
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Kinetic instabilities during plasma etching of GaAs(001)
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Author keywords
[No Author keywords available]
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Indexed keywords
ARSENIC DERIVATIVE;
GALLIUM;
ANISOTROPY;
ARTICLE;
DESORPTION;
DIFFUSION;
MOLECULAR STABILITY;
SPECTRAL SENSITIVITY;
SURFACE PROPERTY;
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EID: 2442467444
PISSN: 01631829
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (10)
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References (30)
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