Roughness scaling of plasma-etched silicon surfaces

Journal of Physics Condensed Matter

Volumn 10, Issue 1, 1998, Pages

  Brault, Pascal ^a   Dumas, Philippe ^b   Salvan, Franck ^b  

^a UNIVERSITÉ D'ORLÉANS   (France)

^b AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002491899     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/10/1/004     Document Type: Review

References (36)

1. Meakin P 1993 Phys. Rep. 235 189 Family F 1990 Physica A 168 561 Krug J and Spohn H 1990 Solids Far from Equilibrium: Growth, Morphology and Defects ed C Godrèche (New York: Cambridge University Press)
2. Meakin P 1993 Phys. Rep. 235 189 Family F 1990 Physica A 168 561 Krug J and Spohn H 1990 Solids Far from Equilibrium: Growth, Morphology and Defects ed C Godrèche (New York: Cambridge University Press)
3. Meakin P 1993 Phys. Rep. 235 189 Family F 1990 Physica A 168 561 Krug J and Spohn H 1990 Solids Far from Equilibrium: Growth, Morphology and Defects ed C Godrèche (New York: Cambridge University Press)
4. Collins G W, Letts S A, Fearon E M, McEachern R L and Bernat T P 1994 Phys. Rev. Lett. 73 708
5. Dumas Ph, Bouffakhredine B, Amra C, Vatel O, André E, Galindo R and Salvan F 1993 Europhys. Lett. 22 717
6. Ecklund E A, Bruinsma R, Rudnick J and Williams R S 1991 Phys. Rev. Lett. 67 1759 Ecklund E A, Snyder E J and Williams R S 1993 Surf. Sci. 285 157
7. Ecklund E A, Bruinsma R, Rudnick J and Williams R S 1991 Phys. Rev. Lett. 67 1759 Ecklund E A, Snyder E J and Williams R S 1993 Surf. Sci. 285 157
8. Petri R, Brault P, Vatel O, Henry D, André E, Dumas Ph and Salvan F 1994 J. Appl. Phys. 75 7498
9. Krim J, Heyvaert I, van Haesendron C and Bruynseraede Y 1992 Phys. Rev. Lett. 70 57
10. Tong W M and Williams R S 1994 Annu. Rev. Phys. Chem. 45 401
11. Das Sarma S 1993 Proc. Int. Conf. on the Complex Geometry in Nature (Budapest, 1993)
12. Kardar M, Parisi G and Zhang Z C 1986 Phys. Rev. Lett. 56 889
13. Amar J G and Family F 1990 Phys. Rev. A 41 3399
14. Yan H, Kessler D and Sander L M 1990 Phys. Rev. Lett. 64 926
15. Keblinsky P, Maritan A, Toigo F, Koplik J and Banavar J R 1994 Phys. Rev. E 49 R937
16. Kim J M and Kosterlitz J M 1989 Phys. Rev. Lett. 62 2289
17. Villain J 1992 J. Physique I 1 19
18. Wolff D E and Villain J 1990 Europhys. Lett. 13 389
19. Bales G S, Bruinsma R, Ecklund E A, Karunasiri R P U, Rudnick J and Zangwill A 1990 Science 249 264
20. Karunasiri R P U, Bruinsma R and Rudnick J 1989 Phys. Rev. Lett. 62 788
21. Yao J H and Guo H 1993 Phys. Rev. E 47 1007
22. Yao J H, Roland C and Guo H 1992 Phys. Rev. A 45 3903
23. Roland C and Guo H 1991 Phys. Rev. Lett. 66 2104
24. Family F and Vicsek T 1985 J. Phys. A: Math. Gen. 18 L75
25. Jullien R and Meakin P 1987 Europhys. Lett. 4 1385
26. Chevrier J, Le Tanh V, Buys R and Derrien J 1991 Europhys. Lett. 16 737
27. Lipowski R and Fischer M E 1986 Phys. Rev. Lett. 56 472 Kardar M and Indekeu J O 1990 Europhys. Lett. 12 161 Andelman D, Joanny J F and Robbins M O 1988 Europhys. Lett. 7 731
28. Lipowski R and Fischer M E 1986 Phys. Rev. Lett. 56 472 Kardar M and Indekeu J O 1990 Europhys. Lett. 12 161 Andelman D, Joanny J F and Robbins M O 1988 Europhys. Lett. 7 731
29. Lipowski R and Fischer M E 1986 Phys. Rev. Lett. 56 472 Kardar M and Indekeu J O 1990 Europhys. Lett. 12 161 Andelman D, Joanny J F and Robbins M O 1988 Europhys. Lett. 7 731
30. Pfeiffer P, Wu Y J, Cole M W and Krim J 1989 Phys. Rev. Lett. 62 1997
31. Pfeiffer P and Cole M W 1990 New. J. Chem. 14 221
32. Jasnow D and Vinals J 1990 Phys. Rev. A 41 6910 Guo H and Jasnow D 1986 Phys. Rev. A 34 5027 Guo H, Hong D C and Kurtze D A 1992 Phys. Rev. A 46 18 667
33. Jasnow D and Vinals J 1990 Phys. Rev. A 41 6910 Guo H and Jasnow D 1986 Phys. Rev. A 34 5027 Guo H, Hong D C and Kurtze D A 1992 Phys. Rev. A 46 18 667
34. Jasnow D and Vinals J 1990 Phys. Rev. A 41 6910 Guo H and Jasnow D 1986 Phys. Rev. A 34 5027 Guo H, Hong D C and Kurtze D A 1992 Phys. Rev. A 46 18 667
35. Zhang X G 1991 J. Electrochem Soc. 138 3750
36. Brault P 1991 J. Phys.: Condens. Matter 3 7073