Modeling arsenic deactivation through arsenic-vacancy clusters using an atomistic kinetic Monte Carlo approach

Applied Physics Letters

Volumn 86, Issue 25, 2005, Pages 1-3

  Pinacho, R ^a   Jaraiz, M ^a   Castrillo, P ^a   Martin Bragado, I ^a   Rubio, J E ^a   Barbolla, J ^a  

^a UNIVERSITY OF VALLADOLID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION; EPITAXIAL GROWTH; MONTE CARLO METHODS; REACTION KINETICS; SILICON; SUBSTITUTION REACTIONS;

ARSENIC DEACTIVATION; ARSENIC-VACANCY CLUSTERS; ATOMISTIC MODELS; ELECTRICAL DEACTIVATION;

ARSENIC;

EID: 24344442952     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1948533     Document Type: Article

References (20)

1. D. Nobili, S. Solmi, A. Parisini, M. Derdour, A. Armigliato, and L Moro, Phys. Rev. B 49, 2477 (1994).
2. S. Solmi, D. Nobili, and J. Shao, J. Appl. Phys. 87, 658 (2000).
3. M. Ramamoorthy and S. T. Pantelides, Phys. Rev. Lett. 76, 4753 (1996).
4. D. C. Mueller, E. Alonso, and W. Fichtner, Phys. Rev. B 68, 045208 (2003).
5. K. C. Pandey, A. Erbil, G. S. Cargill, and R. F. Boehme, Phys. Rev. Lett. 61, 1282 (1988).
6. V. Ranki, J. Nissilä, and K. Saarinen, Phys. Rev. Lett. 88, 105506 (2002).
7. D. W. Lawther, U. Myler, P. J. Simpson, P. M. Rousseau, P. B. Griffin and J. D. Plummer Appl. Phys. Lett. 67, 3575 (1995).
8. M. Jaraiz, P. Castrillo, R. Pinacho, I. Martin-Bragado, and J. Barbolla, in Simulation of Semiconductor Processes and Devices 2001 (SISPAD '01), edited by D. Tsoukalas and C. Tsamis (Springer, Vienna, 2001), p. 10.
9. J. E. Rubio, M. Jaraiz, I. Martin-Bragado, R. Pinacho, P. Castrillo, and J. Barbolla, Mater. Sci. Eng., B 114-115, 151 (2004).
10. N. E. B. Cowern, G. Mannino, P. A. Stolk, F. Roozeboom, H. G. A. Huizing, J. G. M van Berkum, F. Cristiano, A. Claverie, and M. Jaraiz, Phys. Rev. Lett. 82, 4460 (1999)
11. P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289 (1989).
12. I. Martin-Bragado, R. Pinacho, P. Castrillo, M. Jaraiz, J. E. Rubio, and J. Barbolla, Mater. Sci. Eng., B 114-115, 284 (2004).
13. Taurus Reference Manual, version 2002.2, Avanti Corp., Fremont, USA.
14. S. Matsumoto, Y. Ishikawa, and T. Niimi, J. Appl. Phys. 54, 5049 (1983)
15. R. B. Fair, in Impurity Doping, edited by F. F. Y. Wang (North-Holland, Amsterdam, 1981), Chap. 7, p. 315.
16. P. M. Rousseau, P. B. Griffin, and J. D. Plummer, Appl. Phys. Lett. 65, 578 (1994).
17. P. M. Rousseau, P. B. Griffin, W. T. Fang, and J. D. Plummer, J. Appl. Phys. 84, 3593 (1998).
18. P. M. Rousseau, P. B. Griffin, S. C. Kuehne, and J. D. Plummer, IEEE Trans. Electron Devices 43, 547 (1996).
19. S. Solmi, M. Ferri, M. Bersani, D. Giubertoni, and V. Soncini, J. Appl. Phys. 94, 4950 (2003).
20. V. C. Venezia, R. Duffy, L. Pelaz, M. Aboy, A. Jeringa, P. B. Griffin, C. C. Wang, M. J. P. Hopstaken, Y. Tamminga, T. Dao, B. J. Pawlak, and F. Roozeboom, IEDM 2003.