SCOPUS 정보 검색 플랫폼

Volumn 88, Issue 10, 2002, Pages 1055061-1055064

Formation of vacancy-impurity complexes by kinetic processes in highly as-doped Si

(3) Ranki, V a Nissila J a Saarinen, K a

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL IMPURITIES; DIFFUSION; FIELD EFFECT TRANSISTORS; HEAT TREATMENT; ION IMPLANTATION; KINETIC THEORY; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; SEMICONDUCTOR DOPING;

VACANCY IMPURITY CLUSTERS;

SEMICONDUCTING SILICON;

EID: 0037061213 PISSN: 00319007 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (63)

References (19)

1
- 0001394083
- (1999) Science , vol.285 , pp. 2079
- Packan, P.A.¹

2
- 21544458253
- (1980) Appl. Phys. Lett. , vol.36 , pp. 765
- Lietoila, A.¹ Gibbons, J.F.² Sigmon, T.W.³

3
- 33746343244
- (1989) Rev. Mod. Phys. , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

4
- 0012321110
- (1993) J. Appl. Phys. , vol.73 , pp. 691
- Nylandsted Larsen, A.¹

5
- 0000711874
- (1988) Phys. Rev. Lett. , vol.61 , pp. 1282
- Pandey, K.C.¹

6
- 7544220968
- (1996) Phys. Rev. Lett. , vol.76 , pp. 4753
- Ramamoorthy, M.¹ Pantelides, S.T.²

7
- 0000154988
- (1983) Appl. Phys. Lett. , vol.42 , pp. 1043
- Mathiot, D.¹ Pfister, J.C.²

8
- 4243706867
- (1999) Phys. Rev. Lett. , vol.83 , pp. 1795
- Xie, J.¹ Chen, S.P.²

9
- 0008819833
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3257
- Lawther, D.W.¹

10
- 0001010910
- (1999) Phys. Rev. Lett. , vol.82 , pp. 1883
- Saarinen, K.¹

11
- 0000565974
- (1998) Phys. Rev. B , vol.57 , pp. 12911
- Kauppinen, H.¹

12
- 0001599099
- edited by S. T. Pantelides (Gordon and Breach, New York)
- (1986) Deep Centers in Semiconductors , pp. 147
- Watkins, G.D.¹

13
- 0000412810
- (1989) Phys. Rev. B , vol.39 , pp. 10162
- Mäkinen, J.¹

14
- 0000353655
- (1997) Phys. Rev. B , vol.56 , pp. 13172
- Pankratov, O.¹

15
- 0000293605
- (1968) Phys. Rev. , vol.174 , pp. 881
- Elkin, E.L.¹ Watkins, G.D.²

16
- 0008862973
- (1999) J. Appl. Phys. , vol.86 , pp. 4861
- Nylandsted Larsen, A.¹ Christensen, C.² Petersen, J.W.³

17
- 0017732075
- (1977) Inst. Phys. Conf. Ser. , vol.31 , pp. 213
- Sieverts, E.G.¹ Ammerlaan, C.A.J.²

18
- 21544471898
- (1993) J. Appl. Phys. , vol.73 , pp. 8237
- Gossmann, H.-J.¹ Unterwald, F.C.² Luftman, H.S.³

19
- 0000760189
- (1980) Appl. Phys. Lett. , vol.36 , pp. 273
- Chu, W.-K.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.