Digital holography microscope as tool for microelectromechanical systems characterization and design

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 1, 2005, Pages 1-8

  Coppola, G ^a   Iodice, M ^a   Finizio, A ^b   De Nicola, S ^b   Pierattini, G ^b   Ferraro, P ^c   Magro, C ^d   Spoto, G E ^d  

^a CNR   (Italy)

^b CNR   (Italy)

^c ISTITUTO NAZIONALE DI OTTICA   (Italy)

^d STMICROELECTRONICS   (Italy)

Author keywords

Digital holograohy; Microelectromechanical systems; Optical characterization

Indexed keywords

BATCH DATA PROCESSING; BENDING MOMENTS; COMPUTER SIMULATION; HOLOGRAPHY; INTEGRATED CIRCUITS; MICROSCOPES; MICROSTRUCTURE; MORPHOLOGY; SENSITIVITY ANALYSIS;

DIGITAL HOLOGRAPHY; INTRINSIC MOMENTS; MICROELECTROMECHANICAL SYSTEMS (MEMS); OPTICAL CHARACTERIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 24144483165     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1857551     Document Type: Article

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