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Volumn E88-C, Issue 5, 2005, Pages 817-822

RFCV test structure design for a selected frequency range

Author keywords

Capacitance; CV; Gate dielectric; Impedance; MOSFET; Nitride; Oxide; RF; S parameters

Indexed keywords

CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC IMPEDANCE; GATES (TRANSISTOR); MATHEMATICAL MODELS; MOS DEVICES; NITRIDES; OXIDES; PROBLEM SOLVING;

EID: 24144480035     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: 10.1093/ietele/e88-c.5.817     Document Type: Conference Paper
Times cited : (3)

References (8)
  • 1
    • 0033870951 scopus 로고    scopus 로고
    • Limitations of conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics
    • March
    • E.M. Vogel, W.K. Henson, C.A. Richter, and J.S. Suehle, "Limitations of conductance to the measurement of the interface state density of MOS capacitors with tunneling gate dielectrics," IEEE Trans. Electron Devices, vol.47, no.3, pp.601-608, March 2000.
    • (2000) IEEE Trans. Electron Devices , vol.47 , Issue.3 , pp. 601-608
    • Vogel, E.M.1    Henson, W.K.2    Richter, C.A.3    Suehle, J.S.4
  • 2
    • 0032680955 scopus 로고    scopus 로고
    • Estimating oxide thickness of tunnel oxides down to 1.4nm using conventional capacitance-voltage measurements on MOS capacitors
    • April
    • W.K. Henson, K.Z. Ahmed, E.M. Vogel, J.R. Hauser, J.J. Wortman, R.D. Venables, M. Xu, and D. Venables, "Estimating oxide thickness of tunnel oxides down to 1.4nm using conventional capacitance-voltage measurements on MOS capacitors," IEEE Electron Device Lett., vol.20, no.4, pp. 179-181, April 1999.
    • (1999) IEEE Electron Device Lett. , vol.20 , Issue.4 , pp. 179-181
    • Henson, W.K.1    Ahmed, K.Z.2    Vogel, E.M.3    Hauser, J.R.4    Wortman, J.J.5    Venables, R.D.6    Xu, M.7    Venables, D.8
  • 3
    • 0032679052 scopus 로고    scopus 로고
    • MOS capacitance measurements for high-leakage thin dielectrics
    • July
    • K.J. Yang and C. Hu, "MOS capacitance measurements for high-leakage thin dielectrics," IEEE Trans. Electron Devices, vol.46, no.7, pp. 1500-1501, July 1999.
    • (1999) IEEE Trans. Electron Devices , vol.46 , Issue.7 , pp. 1500-1501
    • Yang, K.J.1    Hu, C.2
  • 4
    • 0036565553 scopus 로고    scopus 로고
    • Applicability limits of the two-frequency capacitance measurement technique for the thickness extraction of ultra thin gate oxide
    • May
    • A. Nara, N. Yasuda, H. Satake, and A. Toriumi, "Applicability limits of the two-frequency capacitance measurement technique for the thickness extraction of ultra thin gate oxide," IEEE Trans. Semicond. Manuf., vol.15, no.2, pp.209-213, May 2002.
    • (2002) IEEE Trans. Semicond. Manuf. , vol.15 , Issue.2 , pp. 209-213
    • Nara, A.1    Yasuda, N.2    Satake, H.3    Toriumi, A.4
  • 6
    • 0001954222 scopus 로고    scopus 로고
    • Characterization and metrology for ULSI technology
    • J.R. Hauser and K. Ahmed, "Characterization and metrology for ULSI technology," AIP Conference Proceedings 449, pp.235-239, 1998.
    • (1998) AIP Conference Proceedings , vol.449 , pp. 235-239
    • Hauser, J.R.1    Ahmed, K.2
  • 8
    • 0034258708 scopus 로고    scopus 로고
    • Inversion MOS capacitance extraction for high-leakage dielectrics using a transmission line equivalent circuit
    • Sept.
    • D.W. Barlage, J.T. O'Keeffe, J.T. Kavalieros, M.M. Nguyen, and R.S. Chau, "Inversion MOS capacitance extraction for high-leakage dielectrics using a transmission line equivalent circuit," IEEE Electron Devices Lett., vol.21, no.9, pp.454-456, Sept. 2000.
    • (2000) IEEE Electron Devices Lett. , vol.21 , Issue.9 , pp. 454-456
    • Barlage, D.W.1    O'Keeffe, J.T.2    Kavalieros, J.T.3    Nguyen, M.M.4    Chau, R.S.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.