Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability

Microelectronics Reliability

Volumn 45, Issue 9-11, 2005, Pages 1299-1304

  Li, Y L ^a,b   Tokei Zs ^a   Roussel, Ph ^a   Groeseneken, G ^a,b   Maex, K ^a,b  

^a IMEC   (Belgium)

^b Katholieke Universiteit Leuven   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONICS; POISSON DISTRIBUTION; RELIABILITY;

BEOL; DIELECTRIC RELIABILITY; POISSON AREA SCALING; TDDB;

DIELECTRIC PROPERTIES;

EID: 24144456541     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2005.07.010     Document Type: Conference Paper

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