Studies on nanoimprint process parameters of copper by molecular dynamics analysis

Computational Materials Science

Volumn 34, Issue 4, 2005, Pages 314-322

  Hsu, Q C ^a   Wu, C D ^a   Fang, T H ^b  

^a NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES   (Taiwan)

^b SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Atomic structure deformation; Molecular dynamics; Nanoimprint process; Spring back

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; ENERGY ABSORPTION; LITHOGRAPHY; MOLECULAR DYNAMICS; PUNCHING;

ATOMIC-STRUCTURE DEFORMATION; MOLECULAR DYNAMICAL ANALYSIS; NANOIMPRINT PROCESSES; SPRING BACK;

NANOTECHNOLOGY;

EID: 24044480657     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.commatsci.2005.01.004     Document Type: Article

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