Nanoscale path planning and motion control

Proceedings of the American Control Conference

Volumn 5, Issue , 2005, Pages 3604-3609

  Shakir, Huzefa ^a   Kim, Won Jong ^a  

^a Texas AandM University   (United States)

Author keywords

Maglev system; Multivariable optimal control; Nanomanipulation; Nanomanufacturing; Nanoscale path planning; Precision positioning

Indexed keywords

CONTROL EQUIPMENT; CONTROL SYSTEMS; IMAGE PROCESSING; LITHOGRAPHY; MAGNETIC LEVITATION VEHICLES; MOTION CONTROL; NANOSTRUCTURED MATERIALS; TRACKING (POSITION);

MAGLEV SYSTEMS; MULTIVARIABLE OPTIMAL CONTROL SYSTEM; NANOMANIPULATION; NANOMANUFACTURING; NANOSCALE PATH PLANNING; PRECISION MONITORING;

MOTION PLANNING;

EID: 23944502505     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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