System identification and optimal control of a 6-DOF magnetic levitation stage with nanopositioning capabilites

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 73, Issue 2 PART B, 2004, Pages 957-964

  Shakir, Huzefa ^a   Kim, Won Jong ^a   Verma, Shobhit ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

Author keywords

LQR; Multivariable optimal control; Precision positioning; Stochastic modeling; System identification

Indexed keywords

COMPUTER SIMULATION; DEGREES OF FREEDOM (MECHANICS); IDENTIFICATION (CONTROL SYSTEMS); NANOSTRUCTURED MATERIALS; OPTIMAL CONTROL SYSTEMS; PRECISION ENGINEERING; RANDOM PROCESSES;

LINEAR QUADRATIC REGULATION (LQR); MULTIVARIABLE OPTIMAL CONTROL SYSTEM; PRECISION POSITIONING; STOCHASTIC MODELING;

MAGNETIC LEVITATION;

EID: 19644393465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2004-60507     Document Type: Conference Paper

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