Mechanical aspects of nanoimprint patterning

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2, Issue , 2003, Pages 494-497

  Cross, G L W ^a   O'Connell, B ^a   Pethica, J B ^a   Oliver, W ^b  

^a TRINITY COLLEGE DUBLIN   (Ireland)

^b MTS Nano Instruments Innovation Center   (United States)

Author keywords

Displacement control; Force measurement; Geometry; Heat transfer; Ion beams; Mechanical factors; Mechanical variables measurement; Nanopatterning; Polymer films; Temperature control

Indexed keywords

DEFORMATION; DISPLACEMENT CONTROL; FORCE MEASUREMENT; GEOMETRY; GLASS TRANSITION; HEAT TRANSFER; ION BEAMS; MECHANICAL VARIABLES MEASUREMENT; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; POLYMERS; SEMICONDUCTING FILMS; TEMPERATURE CONTROL; THIN FILMS;

FOCUSED ION BEAM MILLING; MECHANICAL ASPECTS; MECHANICAL FACTORS; NANOIMPRINT PROCESS; NANOPATTERNING; NANOPATTERNING TECHNIQUES; THIN FILM POLYMERS; TRANSITION REGIONS;

POLYMER FILMS;

EID: 84943628270     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2003.1230954     Document Type: Conference Paper

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