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Volumn 38, Issue 16, 2005, Pages 2825-2829
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A comparison between experimental results and a fluid description of a low pressure discharge driven by a double-saddle antenna
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTENNAS;
CHARGED PARTICLES;
COMPUTER SIMULATION;
DIFFUSION;
ELECTRIC DISCHARGES;
ELECTRIC FIELDS;
PLASMA DENSITY;
DIFFUSION CHAMBERS;
DOUBLE-SADDLE ANTENNA;
ELECTRON TEMPERATURE;
ENERGY ANALYZERS;
PLASMAS;
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EID: 23844497340
PISSN: 00223727
EISSN: None
Source Type: Journal
DOI: 10.1088/0022-3727/38/16/013 Document Type: Article |
Times cited : (5)
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References (17)
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