Two-dimensional fluid simulation of capacitively coupled rf electronegative plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 5 A, 1997, Pages 2874-2882

  Chung, Tae Hun ^a   Meng, Lin ^a,c   Yoon, Hyun Jin ^a   Lee, Jae Koo ^b  

^a Dong A University   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Capacitively coupled discharge; Chlorine; Electronegative plasma; Parallel plate rf discharge; Two dimensional fluid simulation

Indexed keywords

CAPACITIVELY COUPLED PLASMAS; ELECTRONEGATIVE PLASMAS; POISSON EQUATION; RADIOFREQUENCY DISCHARGES;

CHLORINE; ELECTRODES; ELECTRONS; GLOW DISCHARGES; IONIZATION OF GASES; MATHEMATICAL MODELS; PLASMA DENSITY; PRESSURE EFFECTS;

PLASMA SIMULATION;

EID: 0031142195     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.2874     Document Type: Article

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