One-dimensional analysis of electronegative discharge plasmas with four charged species

Journal of the Korean Physical Society

Volumn 34, Issue 1, 1999, Pages 29-35

  Yoon, H J ^a   Chung, T H ^a  

^a Dong A University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033475707     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. C. Lee and M. A. Lieberman, J. Vac. Sci. Technol. A13, 368 (1995).
2. S. K. Park and D. J. Economou, J. Appl. Phys. 68, 3904 (1990).
3. T. J. Sommerer and M. J. Kushner, J. Vac. Sci. Technol. B10, 2179 (1992).